2010 Parametric study on synthesis of crystalline silicon nanoparticles in capacitively-coupled silane plasmas, Kil Byoung Chai et al., Thin Solid Films. 518, 6614 (2010.9)
Kil Byoung Chai, C. R. Seon, S. Y. Moon, and Wonho Choe
Parametric study on synthesis of crystalline silicon nanoparticles in capacitively-coupled silane plasmas
Thin Solid Films. 518, 6614 (2010.9)
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