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2000 Simple microwave preionization source for ohmic plasmas, W.Choe et al., Rev. Sci. Instrum 71(7) 2728 (2000.07)

InwooSong 2017.03.15 15:57 조회 수 : 2102

Simple microwave preionization source for ohmic plasmas

W.Choe, G.-C. Kwon, J.Kim, J.Kim, S.-J.Jeon, and S.Huh

Rev. Sci. Instrum 71(7) 2728 (2000.07)

00_Choe_RSI_Jul00.pdf [File Size:180.1KB/Download:61]

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»	Simple microwave preionization source for ohmic plasmas, W.Choe et al., Rev. Sci. Instrum 71(7) 2728 (2000.07)	2102

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