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Parametric study on synthesis of crystalline silicon nanoparticles in capacitively-coupled silane plasmas, Kil Byoung Chai et al., Thin Solid Films. 518, 6614 (2010.9)
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Surface treatment comparison using atmospheric helium plasma jets with different frequencies and target objects, Dan Bee Kim et al., Thin Solid Films. 518, 6700 (2010.9)
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Measurement of rotational temperature using SiH emission spectrum in SiH4 - H2 plasmas, S.Y. Moon et al., Phys. Plasmas. 17, 083501 (2010.8)
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