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Se Youn Moon, W. Y. Kim, H. C. Lee, S. W. Ahn, H. M. Lee, and Wonho Choe


Measurement of rotational temperature using SiH emission spectrum in SiH4 - H2 plasmas


Phys. Plasmas. 17, 083501 (2010.8)


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번호 제목 조회 수
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» Measurement of rotational temperature using SiH emission spectrum in SiH4 - H2 plasmas, S.Y. Moon et al., Phys. Plasmas. 17, 083501 (2010.8) 2353
87 Multiple cavity modes in the helicon plasma generated at very high radio frequency, G.S. Eom et al., J. Vac. Sci. Technol. A. 20, 2079 (2002) 2342
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