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2010 Measurement of rotational temperature using SiH emission spectrum in SiH4 - H2 plasmas, S.Y. Moon et al., Phys. Plasmas. 17, 083501 (2010.8)

InwooSong 2016.05.17 14:34 조회 수 : 2429

Se Youn Moon, W. Y. Kim, H. C. Lee, S. W. Ahn, H. M. Lee, and Wonho Choe


Measurement of rotational temperature using SiH emission spectrum in SiH4 - H2 plasmas


Phys. Plasmas. 17, 083501 (2010.8)


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